Dr. Mikhail Krishtab Profile

Dr. Mikhail Krishtab

at KU Leuven

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Area-selective deposition and bottom-up approaches: an overview of applications in IC manufacturing

Silvia Armini, Mikhail Krishtab, Mattia Pasquali, Jayant Kumar Lodha, Annelies Delabie, Marleen van der Veen, Farid Sebaai

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3012745

KEYWORDS: Manufacturing, Optical lithography, Etching, Atomic layer deposition, Wet etching, Nanostructures, Nanoelectronics, Fabrication, Atomic layer etching

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Proceedings Article | 15 May 2020 Presentation + Paper

Plasma halogenated a-C:H as growth inhibiting layer for ASD of titanium oxide

M. Krishtab, J. Hung, R. Koret, I. Turovets, K. Shah, S. Rangarajan, L. Warad, V. Zhang, R. Ameloot, S. Armini

Proceedings Volume 11325, 113250Y (2020) https://doi.org/10.1117/12.2551492

KEYWORDS: Plasma, Atomic layer deposition, Titanium dioxide, Carbon, Scanning electron microscopy, Silicon, Etching, Metrology, Chlorine, Semiconducting wafers

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Proceedings Article | 18 December 2014 Paper

The chemistry screening for ultra low-k dielectrics plasma etching

A. Zotovich, M. Krishtab, F. Lazzarino, M. Baklanov

Proceedings Volume 9440, 944002 (2014) https://doi.org/10.1117/12.2181010

KEYWORDS: Etching, Oxygen, Polymers, Polymer thin films, Chemistry, Dielectrics, Plasma, FT-IR spectroscopy, Ions, Vacuum ultraviolet

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