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Mikio Takagi
at Toppan Printing Co Ltd
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Publications (2)
Proceedings Article | 11 May 2007 Paper
Improvement of CD variation control for attenuated phase-shift mask
Mikio Takagi, Takashi Mizoguchi, Yosuke Kojima, Tadashi Saga, Takashi Haraguchi, Yuichi Fukushima, Tsuyoshi Tanaka, Yoshimitsu Okuda, Yukio Inazuki, Hiroki Yoshikawa, Satoshi Okazaki
Proceedings Volume 6607, 66070B (2007) https://doi.org/10.1117/12.728924
KEYWORDS: Chromium, Critical dimension metrology, Photomasks, Etching, Printing, Semiconducting wafers, Manufacturing, Mass attenuation coefficient, Metals, Molybdenum
Proceedings Article | 19 May 2006 Paper
Study of mask induced polarization effects on att.PSM in immersion lithography
Takashi Mizoguchi, Yousuke Kojima, Mikio Takagi, Tadashi Saga, Takashi Haraguchi, Toshio Konishi, Yuuichi Fukushima, Tsuyoshi Tanaka, Yoshimitsu Okuda
Proceedings Volume 6283, 62831E (2006) https://doi.org/10.1117/12.681878
KEYWORDS: Nanoimprint lithography, Photomasks, Polarization, Refractive index, Immersion lithography, Mass attenuation coefficient, Lithographic illumination, Lithography, Quartz, Printing
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