Min-Ho Jung
at Shipley Korea Ltd
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Polymers, Coating, Chemistry, Manufacturing, Inspection, Reflectivity, Control systems, Photoresist materials, Humidity, Statistical modeling

Proceedings Article | 24 August 2001 Paper
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Lithography, Electron beam lithography, Etching, Image processing, Resistance, Photoresist materials, Line edge roughness, Photoresist processing, Photoresist developing, 193nm lithography

Proceedings Article | 24 August 2001 Paper
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Oxides, Lithography, Monochromatic aberrations, Optical lithography, Etching, Polymers, Silicon, Scanning electron microscopy, Photomasks, Line edge roughness

Proceedings Article | 23 June 2000 Paper
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Lithography, Etching, Polymers, Resistance, Scanning electron microscopy, Photoresist materials, Critical dimension metrology, Photoresist processing, Yield improvement, Photoresist developing

Proceedings Article | 23 June 2000 Paper
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Lithography, Electronics, Etching, Polymers, Annealing, Interfaces, Reflectivity, Photoresist materials, Natural surfaces, Bottom antireflective coatings

Showing 5 of 9 publications
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