Dr. Min Hu
at Univ Freiburg
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 12 April 2005 Paper
Proc. SPIE. 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
KEYWORDS: Thin films, Ferroelectric materials, Polarization, Electrodes, Crystals, Diffusion, Platinum, Deposition processes, Sol-gels, Thin film deposition

Proceedings Article | 12 April 2005 Paper
Proc. SPIE. 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
KEYWORDS: Thin films, Ferroelectric materials, Radon, Microsystems, Doppler effect, Ceramics, Laser Doppler velocimetry, Deep reactive ion etching, Beam shaping, Thin film deposition

Proceedings Article | 28 February 2005 Paper
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Microelectromechanical systems, Thin films, Mirrors, Etching, Electrodes, Silicon, Micromirrors, Beam shaping, Semiconducting wafers, Temperature metrology

Proceedings Article | 23 February 2005 Paper
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Thin films, Ferroelectric materials, Etching, Electrodes, Silicon, Platinum, Silicon films, Wet etching, Sol-gels, Thin film devices

Proceedings Article | 21 March 2001 Paper
Proc. SPIE. 4235, Smart Structures and Devices
KEYWORDS: Actuators, Detection and tracking algorithms, Sensors, Ceramics, Complex systems, Control systems, Signal processing, Motion models, Electrostriction, Motion controllers

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