Dr. Min Tang Profile

Dr. Min Tang

at Nanyang Technological Univ

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Proceedings Article | 24 December 2011 Paper

Laser microprocessing and nanoengineering of large-area functional micro/nanostructures

M. Tang, X. Xie, J. Yang, Z. Chen, L. Xu, Y. Choo, M. Hong

Proceedings Volume 8204, 820428 (2011) https://doi.org/10.1117/12.904387

KEYWORDS: Lithography, Pulsed laser operation, Laser applications, Laser processing, Nanoengineering, Ultraviolet radiation, Sapphire, Micromachining, Scanning electron microscopy, Metamaterials

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Laser microprocessing and nanoengineering are of great interest to both scientists and engineers, since the inspired properties of functional micro/nanostructures over large areas can lead to numerous unique applications. Currently laser processing systems combined with high speed automation ensure the focused laser beam to process various materials at a high throughput and a high accuracy over large working areas. UV lasers are widely used in both laser microprocessing and nanoengineering. However by improving the processing methods, green pulsed laser is capable of replacing UV lasers to make high aspect ratio micro-grooves on fragile and transparent sapphire substrates. Laser micro-texturing can also tune the wetting property of metal surfaces from hydrophilic to super-hydrophobic at a contact angle of 161° without chemical coating. Laser microlens array (MLA) can split a laser beam into multiple laser beams and reduce the laser spot size down to sub-microns. It can be applied to fabricate split ring resonator (SRR) meta-materials for THz sensing, surface plasmonic resonance (SPR) structures for NIR and molding tools for soft lithography. Furthermore, laser interference lithography combined with thermal annealing can obtain a large area of sub-50nm nano-dot clusters used for SPR applications.

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