Mr. Ming-Ta Lei Profile

Ming-Ta Lei

at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (1)

Proceedings Article | 24 March 2006 Paper

In-line semi-electrical process diagnosis methodology for integrated process window optimization of 65nm and below technology nodes

Ming-Ta Lei, Kok-Hiang Tang, Yung-Chih Wang, Chia-Hsing Huang, Chih-Cherng Jeng, Lu-Kai Wang, Wei Fang, Yan Zhao, Jack Jau, Chin Hsia, M. S. Liang

Proceedings Volume 6152, 61521T (2006) https://doi.org/10.1117/12.657803

KEYWORDS: Etching, Image processing, Electrons, Scanning electron microscopy, Inspection, Signal processing, Copper, Virtual colonoscopy, Calibration, Sensors

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