Dr. Ming Liu
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 15 January 2008 Paper
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Diffraction, X-rays, X-ray diffraction, Computer simulations, Near field diffraction, Zone plates, X-ray astronomy, X-ray lithography, X-ray technology, Synchrotron x-ray imaging

Proceedings Article | 4 January 2008 Paper
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Gold, Electron beam lithography, Polymethylmethacrylate, X-rays, Silicon, Photomasks, Photoresist processing, X-ray telescopes, Electroplating, X-ray lithography

Proceedings Article | 21 November 2007 Paper
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Gold, Electron beam lithography, Diffraction, Electron beams, Spectroscopy, X-rays, X-ray diffraction, Silicon, Photomasks, X-ray lithography

Proceedings Article | 14 November 2007 Paper
Proc. SPIE. 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Gold, Electron beam lithography, X-ray optics, Diffractive optical elements, X-rays, X-ray diffraction, Silicon, Photomasks, Electroplating, X-ray lithography

SPIE Journal Paper | 1 January 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Electron beam lithography, X-ray lithography, Photomasks, Gold, Nickel, X-rays, Scanning electron microscopy, Lithography, Silicon, Zone plates

Showing 5 of 11 publications
Conference Committee Involvement (2)
Advanced Microlithography Technology
12 November 2007 | Beijing, China
Advanced Microlithography Technologies
8 November 2004 | Beijing, China
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