Dr. Ming Lu
Nanofabrication Scientific Associate at Brookhaven National Lab
SPIE Involvement:
Author
Area of Expertise:
electron beam lithography , nanofabrication , plasma etching , x-ray optics , nanophotonics , OLED
Publications (8)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Oxides, Optical lithography, Etching, Metals, Silicon, Resistance, Extreme ultraviolet, Plasma etching, Nanolithography, Scanning transmission electron microscopy

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Etching, Atomic layer deposition, Extreme ultraviolet lithography

Proceedings Article | 9 September 2019 Paper
Proc. SPIE. 11112, X-Ray Nanoimaging: Instruments and Methods IV
KEYWORDS: Microelectromechanical systems, X-ray optics, Lenses, X-rays, X-ray microscopy, Optical alignment, Zone plates, Hard x-rays

SPIE Journal Paper | 14 September 2017
OE Vol. 57 Issue 01
KEYWORDS: Semiconductor lasers, Quantum wells, Laser damage threshold, Quantum cascade lasers, Reflectivity, Waveguide lasers, Heterojunctions, Aluminum, Continuous wave operation, Waveguides

Proceedings Article | 9 March 2017 Presentation + Paper
Proc. SPIE. 10132, Medical Imaging 2017: Physics of Medical Imaging
KEYWORDS: Semiconductors, Photon counting, Sensors, Signal attenuation, Electrodes, Luminescence, Crystals, X-rays, Monte Carlo methods, Detector development, X-ray imaging, Selenium, Signal detection, Prototyping, Breast imaging

Showing 5 of 8 publications
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