Based on the motion mechanism of double-sided polishing, the motion trajectory model of polishing pad relative to medium-aperture optical components was established. This research simulated the trajectory of the abrasive particle relative to the optical component, and then the trajectory was obtained under different processing parameters. Based on the simulation results, different processing parameters were optimized which had been used for double-sided polishing experiments of optical components. The surface roughness and figure of both sides of the optical component after double-sided polishing were detected. The detection results showed that the surface roughness approached 0.5nmRMS, and the surface figure was 0.5λ(λ=632.8nm) for 150mm×150mm×7mm specification medium-aperture optical components.
Process parameter optimization is important for improving the lapping effect of optical elements. Based on a temperature-controlled lapping disc, we present a method using fuzzy theory and orthogonal experiment to optimize lapping process parameters. Unlike the theory of optimization target set with a single evaluation criterion, a comprehensive optimization target with multiple evaluation criteria based on a fuzzy algorithm is proposed in this method. The lapping disc temperature, lapping disc rotation speed, and lapping pressure were selected as the optimization process parameters, and the material removal rate (MRR), surface change uniformity (SCU), and fuzzy synthetic index of lapping (FSILAP) were used as the optimization targets to conduct comparative experiments and analysis. The experimental results showed that when using the optimal process parameter combination obtained by the comprehensive index FSILAP as the optimization target, balanced results for MRR and SCU could be obtained. Notably, the result obtained when using a single evaluation criterion as the optimization target was suboptimal. The proposed method is effective and practical for the optimization of lapping process parameters.
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