Ms. Minhee Jung Profile

Minhee Jung

at Hanyang Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 14 December 2009 Paper

Heat conduction from hot plate to photoresist on top of wafer including heat loss to the environment

Minhee Jung, Sarah Kim, Do Wan Kim, Hye-Keun Oh

Proceedings Volume 7520, 75202I (2009) https://doi.org/10.1117/12.837236

KEYWORDS: Semiconducting wafers, Silicon, Photoresist materials, Temperature metrology, Lithography, Diffusion, Dielectrics, Chemically amplified resists, Antireflective coatings, Nitrogen

Read Abstract +

Proceedings Article | 16 March 2009 Paper

32 nm half pitch formation with high numerical aperture single exposure

Minhee Jung, Joon-Min Park, Moonseok Kim, Sukjoon Hong, Jaisoon Kim, In-Ho Park, Hye-Keun Oh

Proceedings Volume 7274, 72741Z (2009) https://doi.org/10.1117/12.814103

KEYWORDS: Nanoimprint lithography, Lithography, Double patterning technology, Critical dimension metrology, Immersion lithography, Microfluidics, Optical lithography, Binary data, Physics, Ultraviolet radiation

Read Abstract +

Proceedings Article | 4 December 2008 Paper

Acid diffusion length dependency for 32-nm node attenuated and chromeless phase shift mask

Jee-Hye You, Young-Min Kang, Minhee Jung, Hye-Keun Oh

Proceedings Volume 7140, 71403U (2008) https://doi.org/10.1117/12.804611

KEYWORDS: Diffusion, Photomasks, Nanoimprint lithography, Phase shifts, Critical dimension metrology, Double patterning technology, Lithography, Electroluminescence, Immersion lithography, Image processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years