Minwoo Park
Telecom Manager at SK Hynix
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Metrology, Defect detection, Databases, Etching, Inspection, Control systems, Distortion, Optical testing, Overlay metrology, Chemical mechanical planarization, Defect inspection

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Optical lithography, Imaging systems, Etching, Error analysis, Distortion, Double patterning technology, Semiconducting wafers, Overlay metrology, Data analysis

Proceedings Article | 18 March 2015 Paper
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Atrial fibrillation, Manufacturing, Printing, Photomasks, Optical proximity correction, SRAF, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

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