Prof. Miquel B. Salmeron Profile

Prof. Miquel B. Salmeron

at Lawrence Berkeley National Lab

SPIE Involvement:

Author

Publications (6)

SPIE Journal Paper | 6 December 2022

Infrared nanospectroscopy characterization of metal oxide photoresists

Xiao Zhao, Cheng Hao (Will) Wu, Hans Bechtel, Timothy Weidman, Miquel Salmeron

JM3, Vol. 21, Issue 04, 041408, (December 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041408

KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Infrared radiation, Atomic force microscopy, Metal oxides, Spatial resolution, Extreme ultraviolet, Nanospectroscopy, Infrared spectroscopy, FT-IR spectroscopy

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Proceedings Article | 24 March 2020 Presentation

Advanced characterization techniques for nanoscale photoresist structure (Conference Presentation)

Miquel Salmeron

Proceedings Volume 11323, 1132319 (2020) https://doi.org/10.1117/12.2554632

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Proceedings Article | 4 November 1994 Paper

Image processing of multiple beam interferometry fringes for surface forces apparatus applications

Salvador Bosch, F. Wolf, Xudong Xiao, Miguel Salmeron

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192174

KEYWORDS: Mica, Image processing, Metallic coatings, Coating, Interferometry, Silver, Image acquisition, Image analysis, Thin film coatings, Thin films

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Proceedings Article | 16 May 1994 Paper

Ultrafast scanning probe microscopy

David Botkin, Shimon Weiss, D. Ogletree, Miguel Salmeron, Daniel Chemla

Proceedings Volume 2116, (1994) https://doi.org/10.1117/12.175874

KEYWORDS: Scanning tunneling microscopy, Picosecond phenomena, Switches, Ultrafast phenomena, Scanning probe microscopy, Spatial resolution, Resistance, Pulsed laser operation, Capacitance, Ultrafast laser spectroscopy

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Proceedings Article | 4 June 1993 Paper

Quantitative analysis of STM images for surface structure determination: sulfur on Re(0001)

D. Ogletree, Philippe Sautet, James Dunphy, Miguel Salmeron

Proceedings Volume 1855, (1993) https://doi.org/10.1117/12.146367

KEYWORDS: Scanning tunneling microscopy, Chemical species, Metals, Sulfur, Molybdenum, Adsorption, Scanning probe microscopy, Scattering, Chemical elements, Platinum

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Proceedings Article | 1 February 1992 Paper

Imaging of biological material with STM/AFM (Invited Paper)

Miguel Salmeron, D. Ogletree, G. Neubauer, M. Murray, Thomas Wilson, M. Bednarski, William Kolbe, Albert Folch

Proceedings Volume 1556, (1992) https://doi.org/10.1117/12.134886

KEYWORDS: Scanning tunneling microscopy, Molecules, Atomic force microscopy, Microscopy, Resistance, Silicon, Polymers, Semiconducting wafers, Personal digital assistants, Oxides

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Showing 5 of 6 publications

Conference Committee Involvement (1)

Nanotechnology

2 May 2007 | Maspalomas, Gran Canaria, Spain

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