Dr. Mireille K. Akilian
Associate at Exponent Inc
SPIE Involvement:
Profile Summary

Dr. Akilian's areas of expertise include mechanical system design and testing; failure analysis; instrumentation and data acquisition; thin optics; surface metrology including interferometry and systems utilizing Shack-Hartmann wavefront sensors; and analytical and finite element analysis (FEA) including stress analysis, thermal analysis, and modal analysis.

Dr. Akilian’s previous work covers a wide range of precision design principles and applications with sub-micron repeatability requirements. She has extensive experience with ceramics, particularly porous ceramics used in precision air bearing, filtration, and high temperature applications. She has also worked with amorphous glasses, particularly on reducing the surface warp of sheet glass used in flat screen technologies, such as plasma screens and liquid crystal displays (LCD).
Publications (4)

Proceedings Article | 15 June 2006 Paper
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Polishing, Metrology, Silicon, Space telescopes, Epoxies, X-ray telescopes, Semiconducting wafers, Assembly tolerances, Surface finishing, Diffraction gratings

Proceedings Article | 1 September 2005 Paper
Proc. SPIE. 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
KEYWORDS: Wafer-level optics, X-ray optics, Polishing, Metrology, X-rays, Silicon, X-ray telescopes, Semiconducting wafers, Magnetorheological finishing, Surface finishing

Proceedings Article | 11 October 2004 Paper
Proc. SPIE. 5488, UV and Gamma-Ray Space Telescope Systems
KEYWORDS: Wafer-level optics, Thermography, Metrology, Reflection, Silicon, Wavefront sensors, Distortion, Nanoimprint lithography, Semiconducting wafers, Diffraction gratings

Proceedings Article | 29 January 2004 Paper
Proc. SPIE. 5168, Optics for EUV, X-Ray, and Gamma-Ray Astronomy
KEYWORDS: Metrology, Optical lithography, Roentgenium, Etching, Silicon, Optical fabrication, Nanoimprint lithography, Semiconducting wafers, Assembly tolerances, Diffraction gratings

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