Dr. Mitsuhiro Ishihara
Electronics Unit at Takaoka Electric Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 18 August 2018 Presentation + Paper
Proc. SPIE. 10749, Interferometry XIX
KEYWORDS: Semiconductors, Confocal microscopy, Optical components, Edge detection, Image processing, Reliability, Image acquisition, Image analysis, Photomasks, Integrated circuits

SPIE Journal Paper | 1 June 1999
OE Vol. 38 Issue 06
KEYWORDS: Confocal microscopy, Microscopes, Objectives, Inspection, Imaging systems, Image processing, Camera shutters, CCD image sensors, Image sensors, Semiconductors

Proceedings Article | 7 May 1999 Paper
Proc. SPIE. 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
KEYWORDS: Confocal microscopy, Phase shifting, Glasses, Manufacturing, Inspection, CCD cameras, Objectives, Phase measurement, Systems engineering, Optics manufacturing

Proceedings Article | 30 June 1998 Paper
Proc. SPIE. 3478, Laser Interferometry IX: Techniques and Analysis
KEYWORDS: Confocal microscopy, Microscopes, Imaging systems, Image processing, Inspection, Image sensors, 3D metrology, Objectives, CCD image sensors, 3D image processing

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