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Dr. Miyang Kim
Senior Researcher at SAMSUNG Electro-Mechanics
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Publications (1)
Proceedings Article | 29 March 2007 Paper
Focused ion beam nano patterning for fabrications of III-nitride light emitting diodes
M. Y. Kim, Y. C. Park, S. S. Hong, B. K. Kim, D. W. Kim, D. Y. Lee
Proceedings Volume 6517, 65171M (2007) https://doi.org/10.1117/12.710795
KEYWORDS: Gallium nitride, Ion beams, Electron beam lithography, Light emitting diodes, Etching, Optical lithography, Green light emitting diodes, Nanolithography, Ions, Scanning electron microscopy
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