Moez El-Massry
at Si-Ware Systems
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Aluminum, Mirrors, Reflectivity, Reflection, Metals, Silicon, Micromirrors, Systems modeling, Deep reactive ion etching

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