Mohamed Kilany
at Ain Shams Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2018 Paper
Proc. SPIE. 10545, MOEMS and Miniaturized Systems XVII
KEYWORDS: Microelectromechanical systems, Optical filters, Waveguides, Silicon, Microopto electromechanical systems, Deep reactive ion etching, Optical filtering, Semiconducting wafers, Optical filter design, Multimode interference devices, Wave propagation interference

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