Monica Bollani
at L-NESS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 May 2009 Paper
Proc. SPIE. 7364, Nanotechnology IV
KEYWORDS: Electron beam lithography, Germanium, Silicon, Atomic force microscopy, Quantum dots, Scanning electron microscopy, Photomasks, Plasma enhanced chemical vapor deposition, Reactive ion etching, Chemical elements

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