Dr. Mordechai Rothschild
Leader of Submicrometer ResGrp at MIT Lincoln Lab
SPIE Involvement:
Publications (69)

SPIE Journal Paper | 19 November 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Photomasks, Optical lithography, Etching, Microsystems, Grayscale lithography, Device simulation, Photoresist processing, Photoresist materials, Liquids, Lithography

Proceedings Article | 17 May 2019 Paper
Proc. SPIE. 11010, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XX
KEYWORDS: Spectroscopy, Reflectivity, Toxic industrial chemicals, Biological and chemical sensing, Absorption, Sensors, Chemical fiber sensors, Colorimetry, Thin films

Proceedings Article | 31 May 2018 Paper
Proc. SPIE. 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX
KEYWORDS: Sensors, Copper, Ions, Biological and chemical sensing, Light emitting diodes, Toxic industrial chemicals, Colorimetry, Chemical analysis, Reflectivity, Absorption

Proceedings Article | 26 October 2017 Paper
Proc. SPIE. 10343, Metamaterials, Metadevices, and Metasystems 2017
KEYWORDS: Absorption, Amorphous silicon, Aluminum, Thin films, Scattering, Solar cells, Nanostructures, Glasses, Reflectivity, Polymethylmethacrylate

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Electron beam lithography, Maskless lithography, Etching, Photoresist processing, Silicon, Photoresist materials, Microfabrication, Lithography, Semiconducting wafers, Critical dimension metrology, Resistance

Showing 5 of 69 publications
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