Dr. Morihisa Houga
Senior Researcher at Dai Nippon Printing Co Ltd
SPIE Involvement:
Publications (52)

SPIE Journal Paper | 31 March 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Photomasks, Manufacturing, Optical lithography, Nanoimprint lithography, Optical proximity correction, Nanotechnology, Printing, Semiconductor lasers, Semiconductors, Extreme ultraviolet

Proceedings Article | 22 April 2011 Paper
Proc. SPIE. 8081, Photomask and Next-Generation Lithography Mask Technology XVIII
KEYWORDS: Electron beams, Sensors, Quartz, Silicon, Image resolution, Photomasks, Semiconducting wafers, Signal detection, Vestigial sideband modulation, Resolution enhancement technologies

Proceedings Article | 7 February 2011 Paper
Proc. SPIE. 7957, Practical Holography XXV: Materials and Applications
KEYWORDS: Holograms, Holography, Nano opto mechanical systems, Polarization, Near field, Data processing, Nanophotonics, Prototyping, Nanolithography, Near field optics

Proceedings Article | 25 September 2010 Paper
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Oxides, Quartz, Ultraviolet radiation, Silicon, Chromium, Scanning electron microscopy, Chemical analysis, Nanoimprint lithography, Photoresist processing, Chemically amplified resists

Proceedings Article | 30 September 2009 Paper
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Thin films, Etching, Quartz, Ultraviolet radiation, Silicon, Photomasks, Nanoimprint lithography, Photoresist processing, Beam propagation method, Chemically amplified resists

Showing 5 of 52 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (6)
Photomask and Next Generation Lithography Mask Technology XIV
17 April 2007 | Yokohama, Japan
Photomask and Next-Generation Lithography Mask Technology XIII
18 April 2006 | Yokohama, Japan
Photomask and Next-Generation Lithography Mask Technology XII
13 April 2005 | Yokohama, Japan
Photomask and Next-Generation Lithography Mask Technology XI
14 April 2004 | Yokohama, Japan
Photomask and NGL Mask Technology X
16 April 2003 | Yokohama, Japan
Showing 5 of 6 Conference Committees
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top