Mr. Motohiro Tanaka Profile

Motohiro Tanaka

at Hitachi High-Tech America Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 30 April 2023 Poster

Radical etching of high-k and low-k dielectrics for three-dimension device manufacturing with microwave-ECR etching system

Yusuke Nakatani, Yasushi Sonoda, Taku Iwase, Yi Lin, Masashi Kawabata, Motohiro Tanaka

Proceedings Volume PC12499, PC124990I (2023) https://doi.org/10.1117/12.2656040

KEYWORDS: Etching, Dielectrics, Gallium arsenide, Reactive ion etching, Manufacturing, Transistors, Plasma etching, Plasma, Magnetism, Ions

Read Abstract +

Proceedings Article | 5 April 2012 Paper

Evaluation of roughness transfer from Litho to Etch using CD-SEM

M. Tanaka, T. Ishimoto, H. Kazumi, S. Cheng

Proceedings Volume 8324, 83242H (2012) https://doi.org/10.1117/12.917962

KEYWORDS: Image enhancement, Etching, Line width roughness, Line edge roughness, Scanning electron microscopy, Semiconductors, Critical dimension metrology, Metrology, Image quality, Semiconducting wafers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years