Moutaz Fakhry
Senior Member of Technical Staff
SPIE Involvement:
Author
Area of Expertise:
Lithography , Source mask optimization
Publications (13)

Proceedings Article | 18 March 2019 Presentation
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Diagnostics, Failure analysis, Machine learning, Feature extraction, Inspection, High volume manufacturing, Silicon

Proceedings Article | 10 April 2018 Presentation + Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Machine learning, Data modeling, Model-based design, Testing and analysis, Manufacturing, Lithography, Design for manufacturing, Feature extraction

Proceedings Article | 4 April 2018 Presentation + Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Metals, Optical lithography, Manufacturing, Machine learning, Image classification, Design for manufacturing, Library classification systems, Pattern recognition

Proceedings Article | 30 March 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Databases, Process modeling, Analytics, Design for manufacturability, Design for manufacturing, Yield improvement, Silicon, Model-based design, Statistical analysis, Product engineering, Metals, Optical lithography, Charge-coupled devices, Computer simulations, Manufacturing, Logic, Optical proximity correction, Digital electronics

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Optical lithography, Image processing, Design for manufacturing, Manufacturing, Lithography, Design for manufacturability, Optical proximity correction, Model-based design, Image quality, Resolution enhancement technologies

Showing 5 of 13 publications
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