Muhammad A. Othman
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2018 Paper
Proc. SPIE. 10545, MOEMS and Miniaturized Systems XVII
KEYWORDS: Microelectromechanical systems, Actuators, Optical fibers, Mirrors, Resonators, Reflectivity, Optical resonators, Micromirrors, Photomasks, Deep reactive ion etching

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Optical fibers, Optical filters, Mirrors, Reflection, Etching, Coating, Reflectivity, Microopto electromechanical systems, Micromirrors, Deep reactive ion etching, Metallic coatings, Dielectric filters

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