Mr. Mukund K. Raghunathan Profile

Mukund K. Raghunathan

Applications Manager at KLA Tencor Corp

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Publications (2)

Proceedings Article | 28 February 2005 Paper

Effects of design geometry on SU8 polymer waveguides

Anthony Holland, Vishal Balkunje, Arnan Mitchell, Michael Austin, Mukund Raghunathan, Gorgi Kostovski

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.582267

KEYWORDS: Waveguides, Polymers, Cladding, Polymer multimode waveguides, Photoresist materials, Refractive index, Etching, Silicon, Plasma etching, Liquids

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Proceedings Article | 17 January 2005 Paper

Fabrication of raised and inverted SU8 polymer waveguides

Anthony Holland, Arnan Mitchell, Vishal Balkunje, Mike Austin, Mukund Raghunathan

Proceedings Volume 5644, (2005) https://doi.org/10.1117/12.579457

KEYWORDS: Waveguides, Polymers, Cladding, Polymer multimode waveguides, Etching, Plasma etching, Microfluidics, Semiconducting wafers, Photoresist materials, Refractive index

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