Dr. Murat Tepegoz Profile

Dr. Murat Tepegoz

at Apple Inc

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Publications (10)

Proceedings Article | 31 May 2017 Paper

An 80x80 microbolometer type thermal imaging sensor using the LWIR-band CMOS infrared (CIR) technology

Firat Tankut, Mustafa Cologlu, Hidir Askar, Hande Ozturk, Hilal Dumanli, Feyza Oruc, Bilge Tilkioglu, Beril Ugur, Orhan Sevket Akar, Murat Tepegoz, Tayfun Akin

Proceedings Volume 10177, 101771X (2017) https://doi.org/10.1117/12.2275161

KEYWORDS: Sensors, Microbolometers, CMOS sensors, Infrared technology, Infrared sensors, CMOS technology, Thermography, Image sensors, Infrared imaging, Infrared radiation

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This paper introduces an 80x80 microbolometer array with a 35 μm pixel pitch operating in the 8-12 μm wavelength range, where the detector is fabricated with the LWIR-band CMOS infrared technology, shortly named as CIR, which is a novel microbolometer implementation technique developed to reduce the detector cost in order to enable the use of microbolometer type sensors in high volume markets, such as the consumer market and IoT. Unlike the widely used conventional surface micromachined microbolometer approaches, MikroSens’ CIR detector technology does not require the use of special high TCR materials like VOx or a-Si, instead, it allows to implement microbolometers with standard CMOS layers, where the suspended bulk micromachined structure is obtained by only few consecutive selective MEMS etching steps while protecting the wirebond pads with a simple lithograpy step. This approach not only reduces the fabrication cost but also increases the production yield. In addition, needing simple subtractive post-CMOS fabrication steps allows the CIR technology to be carried out in any CMOS and MEMS foundry in a truly fabless fashion, where industrially mature and Au-free wafer level vacuum packaging technologies can also be carried out, leading to cost advantage, simplicity, scalability, and flexibility. The CIR approach is used to implement an 80x80 FPA with 35 μm pixel pitch, namely MS0835A, using a 0.18 μm CMOS process. The fabricated sensor is measured to provide NETD (Noise Equivalent Temperature Difference) value of 163 mK at 17 fps (frames per second) and 71 mK at 4 fps with F/1.0 optics in a dewar environment. The measurement results of the wafer level vacuum packaged sensors with one side AR coating shows an NETD values of 112 mK at 4 fps with F/1.1 optics, i.e., demonstrates a good performance for high volume low-cost applications like advanced presence detection and human counting applications. The CIR approach of MikroSens is scalable and can be used to reduce the pixel pitch even further while increasing the array size if necessary for various other low-cost, high volume applications.

Proceedings Article | 3 May 2017 Paper

An advanced presence detection system using the CMOS Infrared (CIR) technology

Tugay Arslan, Gorkem Cilbir, Murat Tepegoz, Tayfun Akin

Proceedings Volume 10177, 101771Y (2017) https://doi.org/10.1117/12.2275165

KEYWORDS: Sensors, Thermography, Infrared sensors, Infrared radiation, Infrared technology, CMOS sensors, Infrared detectors, Cameras, Infrared imaging, Microbolometers

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Proceedings Article | 24 June 2014 Paper

A miniature low-cost LWIR camera with a 160x120 microbolometer FPA

Murat Tepegoz, Alper Kucukkomurler, Firat Tankut, Selim Eminoglu, Tayfun Akin

Proceedings Volume 9070, 90701O (2014) https://doi.org/10.1117/12.2057508

KEYWORDS: Sensors, Microbolometers, Thermography, Cameras, Staring arrays, Infrared sensors, Signal detection, Infrared imaging, Infrared radiation, Bridges

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Proceedings Article | 31 May 2012 Paper

An uncooled microbolometer focal plane array using heating based resistance nonuniformity compensation

Murat Tepegoz, Alp Oguz, Alperen Toprak, S. Ufuk Senveli, Eren Canga, M. Yusuf Tanrikulu, Tayfun Akin

Proceedings Volume 8353, 83531E (2012) https://doi.org/10.1117/12.964525

KEYWORDS: Sensors, Resistance, Staring arrays, Microbolometers, Readout integrated circuits, Silicon, Resistors, CMOS sensors, Analog electronics, Clocks

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Proceedings Article | 21 May 2011 Paper

A two-stage digital-to-analog converter for bias correction in uncooled microbolometer arrays

Alperen Toprak, Murat Tepegoz, Tayfun Akin

Proceedings Volume 8012, 80121S (2011) https://doi.org/10.1117/12.890235

KEYWORDS: Sensors, Resistance, Microbolometers, Analog electronics, Staring arrays, Resistors, Silicon, Computer architecture, Multiplexers, Neodymium

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Proceedings Article | 7 May 2009 Paper

A bias heating cancellation method for resistive uncooled microbolometer detectors

Alp Oguz, Murat Tepegoz, Tayfun Akin

Proceedings Volume 7298, 72982G (2009) https://doi.org/10.1117/12.823720

KEYWORDS: Sensors, Active sensors, Resistance, Infrared sensors, Infrared radiation, Thermography, Infrared detectors, Capacitance, Microbolometers, Temperature metrology

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Proceedings Article | 7 May 2009 Paper

A column-based two-stage analog-to-digital converter for uncooled microbolometer arrays

Alperen Toprak, Murat Tepegoz, Tayfun Akin

Proceedings Volume 7298, 72982H (2009) https://doi.org/10.1117/12.823721

KEYWORDS: Amplifiers, Microbolometers, Calibration, Analog electronics, Synthetic aperture radar, Device simulation, Integration, Structural design, Imaging arrays, Sensors

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Proceedings Article | 17 April 2008 Paper

A low power readout circuit approach for uncooled resistive microbolometer FPAs

Murat Tepegoz, Alperen Toprak, Tayfun Akin

Proceedings Volume 6940, 694026 (2008) https://doi.org/10.1117/12.786609

KEYWORDS: Staring arrays, Capacitance, Multiplexing, Sensors, Microbolometers, Switches, Digital electronics, Temperature metrology, Signal processing, Metals

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Proceedings Article | 17 April 2008 Paper

An optimum reference detector design for uncooled microbolometer FPAs

Murat Tepegoz, Fehmi Civitci, Tayfun Akin

Proceedings Volume 6940, 694028 (2008) https://doi.org/10.1117/12.786611

KEYWORDS: Sensors, Infrared sensors, Resistance, Active sensors, Infrared radiation, Thermography, Infrared detectors, Microbolometers, Capacitance, Staring arrays

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Proceedings Article | 14 May 2007 Paper

Resistance non-uniformity correction method using bias heating for resistive type uncooled microbolometer FPAs

Murat Tepegoz, Tayfun Akin

Proceedings Volume 6542, 65423T (2007) https://doi.org/10.1117/12.726570

KEYWORDS: Sensors, Resistance, Signal detection, Staring arrays, Microbolometers, Infrared sensors, Nonuniformity corrections, Calibration, Infrared detectors, Transistors

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Showing 5 of 10 publications

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