The surface damage processes of fused silica are studied by a new photo-acoustic probe with Anti-Emi (Electron-Magnetic Interference), easy-adjusted and non-damage for the samples, and the damage thresholds is detected according to the rapid increase of the acoustic signals. Experimental results show that the damage threshold of fused silica samples is 13.86 J/cm2 at the wavelength of 1064 nm and the pulse width of 10 ns. This work may provide an effective technical support for the laser-induced damage detection.
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