We developed stretchable and flexible out-of-plane electrodes based on PDMS substrate using general MEMS
fabrication processes. The electrodes were designed to be used for devices that require large elongation without electrical
disconnection. Thus, the stretchable electrode was designed to have serpentine metal line suspended above the substrate
along its entire length. To fabricate the out-of-plane structure, the metal pattern of the electrode was created on a
parylene layer that was suspended above the PDMS substrate by using sacrificial photoresist layer. The metal line was
covered by a second parylene layer, thereby encapsulated and electrically insulated. In serpentine electrodes, the
parylene layer was attached with PDMS substrate through parylene posts located nearby the metal line, which restrained
lateral movements of the metal line. The stretch test, bending test, and twist test were performed using our customdesigned
test modules to characterize the stretchability and flexibility of the fabricated electrodes. With up to 32 % strain,
with various bending radii, and up to 360° twist angle, stable electrical connection was demonstrated. From these results,
the proposed out-of-plane electrodes would be useful in stretchable and flexible applications such as wearable
electronics and biomedical devices.
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