Dr. Nan Fu Profile

Dr. Nan Fu

Member of Technical Staff at GLOBALFOUNDRIES Inc

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Publications (2)

Proceedings Article | 5 October 2016 Paper

OPC model sampling evaluation and weakpoint “in-situ” improvement

Nan Fu, Shady Elshafie, Guoxiang Ning, Stefan Roling

Proceedings Volume 9985, 998527 (2016) https://doi.org/10.1117/12.2240934

KEYWORDS: Optical proximity correction, Optical properties, Algorithm development, Optical alignment, Geometrical optics, Wafer-level optics, Computer simulations, Semiconducting wafers, Photomasks, Lithography

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Proceedings Article | 23 October 2015 Paper

Rule-based OPC and MPC interaction for implant layers

Nan Fu, Guoxiang Ning, Florian Werle, Stefan Roling, Sandra Hecker, Paul Ackmann, Christian Buergel

Proceedings Volume 9635, 96351H (2015) https://doi.org/10.1117/12.2197195

KEYWORDS: Reticles, Semiconducting wafers, Optical proximity correction, Logic, Lithography, Photomasks, Data modeling, Tolerancing, Critical dimension metrology, Silicon

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