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Naoki Tanaka
at Osaka Univ
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Author
Publications (4)
Proceedings Article | 1 December 2022 Presentation + Paper
Effect of surface free energy of organic underlayer on dissolution kinetics of poly(4-hydroxystyrene) film in tetramethylammonium hydroxide aqueous developer
Yuqing Jin, Tomoe Otsuka, Naoki Tanaka, Takahiro Kozawa
Proceedings Volume 12292, 1229207 (2022) https://doi.org/10.1117/12.2642503
KEYWORDS: Natural surfaces, Standards development, Polymers, Stochastic processes, Chemically amplified resists, Photoresist processing, Interfaces, Testing and analysis, Molecules, Liquids
Proceedings Article | 25 May 2022 Presentation + Paper
State of polymer chains in alkaline developer studied by dynamic light scattering
Proceedings Volume 12055, 120550J (2022) https://doi.org/10.1117/12.2614138
KEYWORDS: Polymer thin films, Dynamic light scattering
Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Analysis of dissolution kinetics of poly(4-hydroxystyrene) with different molecular weight distributions in alkaline aqueous solution using machine learning
Proceedings Volume 11612, 116120R (2021) https://doi.org/10.1117/12.2584067
Proceedings Article | 20 September 2020 Presentation
Study on dependence of transient swelling layer formation on molecular weight and dispersion of backbone polymer of chemically amplified EUV resists
Proceedings Volume 11517, 115170G (2020) https://doi.org/10.1117/12.2574877
KEYWORDS: Polymers, Stochastic processes, Dispersion, Extreme ultraviolet, Line edge roughness, Molecules, Photons, Bridges, Chemical reactions, Diffusion
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