Dr. Nathan Marchack Profile

Dr. Nathan Marchack

Research Staff Member at IBM Thomas J Watson Research Ctr

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Publications (6)

Proceedings Article | 1 May 2023 Presentation + Paper

Characterization of TSV etch from a sustainability standpoint

Osakpolo Isowamwen, Nathan Marchack, Devi Koty, Qingyun Yang, Hien Nguyen, Steve Molis, Scott Lefevre, Marco Hopstaken, Andy Metz, Jeff Shearer, Robert Bruce

Proceedings Volume 12499, 124990H (2023) https://doi.org/10.1117/12.2658564

KEYWORDS: Etching, Passivation, Ions, Sustainability, Plasma etching, Scanning electron microscopy, Semiconductors, Semiconductor manufacturing, Semiconducting wafers, Plasma

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Proceedings Article | 25 May 2022 Presentation + Paper

Control of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures

John Papalia, Devi Koty, Nathan Marchack, Scott Lefevre, Qingyun Yang, Aelan Mosden, Sebastian Engelmann, Robert Bruce

Proceedings Volume 12056, 1205603 (2022) https://doi.org/10.1117/12.2614264

KEYWORDS: Etching, Polymers, Diffusion, Plasma etching, Ions, Silicon, Plasma, Semiconducting wafers, Scanning electron microscopy, Deep reactive ion etching, Reactive ion etching, Packaging

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Proceedings Article | 17 May 2019 Presentation + Paper

Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy

Eric Zhang, Yves Martin, Jason Orcutt, Chi Xiong, Martin Glodde, Nathan Marchack, Elizabeth Duch, Tymon Barwicz, Laurent Schares, William M. Green

Proceedings Volume 11010, 110100B (2019) https://doi.org/10.1117/12.2519206

KEYWORDS: Sensors, Waveguides, Photonic integrated circuits, Spectroscopy, Silicon, Semiconductor lasers, Silicon photonics, Integrated photonics, Sensor networks, Fabry–Perot interferometers

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Proceedings Article | 16 May 2018 Presentation + Paper

Localization and quantification of trace-gas fugitive emissions using a portable optical spectrometer

Eric Zhang, Chu Teng, Theodore van Kessel, Levente Klein, Ramachandran Muralidhar, Chi Xiong, Yves Martin, Jason Orcutt, Marwan Khater, Laurent Schares, Tymon Barwicz, Nathan Marchack, Swetha Kamlapurkar, Sebastian Engelmann, Gerard Wysocki, Norma Sosa, William M. Green

Proceedings Volume 10629, 106290Y (2018) https://doi.org/10.1117/12.2305174

KEYWORDS: Sensors, Spectroscopy, Methane, Optical sensors, Photodetectors, Absorption spectroscopy, Absorption, Calibration, Absorbance

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Proceedings Article | 21 March 2017 Presentation + Paper

Reducing Line Edge Roughness in Si and SiN through plasma etch chemistry optimization for photonic waveguide applications

Nathan Marchack, Marwan Khater, Jason Orcutt, Josephine Chang, Steven Holmes, Tymon Barwicz, Swetha Kamlapurkar, William Green, Sebastian Engelmann

Proceedings Volume 10149, 101490F (2017) https://doi.org/10.1117/12.2258112

KEYWORDS: Line edge roughness, Silicon, Reactive ion etching, Waveguides, Sensor technology, Optical lithography, Silicon photonics, Waveguide sensors, Sensors, Integrated circuits, Plasma, Etching, Line width roughness, Photomasks, Plasma etching, Lithography

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Proceedings Article | 23 March 2016 Paper

Evaluation of ALE processes for patterning

J. Papalia, N. Marchack, R. Bruce, H. Miyazoe, S. Engelmann, E. Joseph

Proceedings Volume 9782, 97820H (2016) https://doi.org/10.1117/12.2219280

KEYWORDS: Etching, Chemistry, Optical lithography, Critical dimension metrology, Line edge roughness, Line width roughness, Plasma, Tin, Oxides

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Showing 5 of 6 publications

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