Neilanjan Dutta
Research Assistant at Univ of Delaware
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 1 April 2010
JM3 Vol. 9 Issue 02
KEYWORDS: Photonic crystals, Polymers, Photomasks, Photoresist processing, Ultraviolet radiation, Calibration, Deep ultraviolet, Semiconductor manufacturing, Lithography, Image processing

Proceedings Article | 24 February 2009 Paper
Proc. SPIE. 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
KEYWORDS: Fabrication, Lithography, Calibration, Polymers, Image processing, Ultraviolet radiation, Photonic crystals, Scanning electron microscopy, Photomasks, Photoresist processing

Proceedings Article | 24 February 2009 Paper
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Semiconductors, Resonators, Silica, Waveguides, Etching, Electrodes, Polymers, Metals, Semiconductor lasers, Photomasks

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