CONFERENCE PROCEEDINGS
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Dr. Nelda Antonovaité
Product Manager at Nearfield Instruments
SPIE Involvement:
Author
Area of Expertise:
Viscoelasticity , Mechanical properties , Biomechanics , Brain mechanics , Mechanobiology , Indentation
Websites:
Personal Website
Publications (5)
Proceedings Article | 10 April 2024 Poster
Validation of high-throughput AFM for copper pad metrology in high volume manufacturing
Proceedings Volume 12955, 129552U (2024) https://doi.org/10.1117/12.3010488
KEYWORDS: Semiconducting wafers, High volume manufacturing, Metrology, Copper, Chemical mechanical planarization, Surface finishing, Semiconductor manufacturing, Process control, Miniaturization, Atomic force microscopy
Proceedings Article | 10 April 2024 Poster
High throughput, angstrom-level metrology for copper-copper hybrid bonding
Proceedings Volume 12955, 129552T (2024) https://doi.org/10.1117/12.3010482
KEYWORDS: Metrology, Semiconducting wafers, Copper, Chemical mechanical planarization, Surface roughness, High volume manufacturing, Atomic force microscopy, Wafer bonding, Wafer testing, System integration
Proceedings Article | 10 April 2024 Poster
Validation of non-destructive 3D probe-based metrology for EUV lithography
Proceedings Volume 12955, 1295531 (2024) https://doi.org/10.1117/12.3010719
KEYWORDS: Extreme ultraviolet lithography, Metrology, 3D metrology, Nondestructive evaluation, Line width roughness, Atomic force microscopy, Surface roughness, Photoresist materials, Line edge roughness, Algorithm development
Proceedings Article | 15 March 2018 Presentation
Structure-stiffness relation of the brain tissue determined by oscillatory indentation mapping (Conference Presentation)
Nelda Antonovaite, Wytse Wadman, Elly Hol, Davide Iannuzzi
Proceedings Volume 10496, 1049614 (2018) https://doi.org/10.1117/12.2288961
KEYWORDS: Brain, Tissues, Brain mapping, Mechanics, Protactinium, Neurological disorders, Atomic force microscopy, Neuroimaging, Neurons, Glia
Proceedings Article | 15 March 2018 Presentation
Mechanical properties of chicken embryo mesoderm during somite formation (Conference Presentation)
Marica Marrese, Nelda Antonovaité, Ben K. Nelemans, Erik Paardekam, Theodoor Smit, Davide Iannzzi
Proceedings Volume 10496, 1049615 (2018) https://doi.org/10.1117/12.2289014
KEYWORDS: Tissues, In vivo imaging, Optical coherence tomography, Elastography, Transducers, Tissue optics, Coherence (optics)
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