Dr. Neus Sabaté Profile

Dr. Neus Sabaté

Postdoctoral Researcher at Ctr Nacional de Microelectrónica

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Publications (13)

Proceedings Article | 1 June 2015 Paper

Small-volume multiparametric electrochemical detection at low cost polymeric devices featuring nanoelectrodes

Maria Kitsara, Josep Maria Cirera, Miguel Aller-Pellitero, Neus Sabaté, Jaume Punter, Jordi Colomer-Farrarons, Pere Miribel-Català, F. Javier del Campo

Proceedings Volume 9518, 95180Z (2015) https://doi.org/10.1117/12.2178908

KEYWORDS: Polymers, Electrodes, Silicon, Semiconducting wafers, Lithography, Nanolithography, Glucose, Sensors, Biosensing, Rapid manufacturing

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Proceedings Article | 21 May 2015 Paper

Fabrication and characterization of a fuel flexible micro-reformer fully integrated in silicon for micro-solid oxide fuel cell applications

D. Pla, M. Salleras, I. Garbayo, A. Morata, N. Sabaté, N. Divins, J. Llorca, A. Tarancón

Proceedings Volume 9517, 95172D (2015) https://doi.org/10.1117/12.2178860

KEYWORDS: Bioalcohols, Methane, Silicon, Hydrogen, Hydrogen production, Oxides, Silica, Microfabrication, Semiconducting wafers, Temperature metrology

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Proceedings Article | 5 May 2011 Paper

A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer

C. Calaza, M. Salleras, N. Sabaté, J. Santander, C. Cané, L. Fonseca

Proceedings Volume 8066, 806627 (2011) https://doi.org/10.1117/12.887099

KEYWORDS: Silicon, Infrared radiation, Thermography, Temperature metrology, Aluminum, Resistance, Modulation, Infrared detectors, Spectroscopy, Infrared spectroscopy

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Proceedings Article | 19 May 2009 Paper

Fabrication and characterization of yttria-stabilized zirconia membranes for micro solid oxide fuel cells

Íñigo Garbayo, A. Tarancón, J. Santiso, A. Cavallaro, J. Roqueta, G. Garcia, I. Gràcia, C. Cané, N. Sabaté

Proceedings Volume 7362, 73621B (2009) https://doi.org/10.1117/12.821613

KEYWORDS: Silicon, Zirconium dioxide, Solids, Oxides, Annealing, Electrodes, Semiconducting wafers, X-ray diffraction, Pulsed laser deposition, Microelectromechanical systems

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Proceedings Article | 30 December 2008 Paper

Preconcentrator-based sensor µ-system for low-level benzene detection

P. Ivanov, I. Gràcia, F. Blanco, J.-P. Raskin, R. Cumeras, N. Sabaté, X. Vilanova, X. Correig, L. Fonseca, E. Figueras, J. Santander, C. Cané

Proceedings Volume 7268, 72680S (2008) https://doi.org/10.1117/12.807433

KEYWORDS: Sensors, Gas sensors, Silicon, Fabrication, Deep reactive ion etching, Palladium, Semiconducting wafers, Wafer bonding, Optical lithography, Aluminum

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Proceedings Article | 17 May 2007 Paper

Micro and nanotechnologies for the development of an integrated chromatographic system

O. Casals, A. Romano-Rodríguez, X. Illa, C. Zamani, A. Vilà, J. R. Morante, I. Gràcia, P. Ivanov, N. Sabaté, L. Fonseca, J. Santander, E. Figueras, C. Cané

Proceedings Volume 6589, 65891A (2007) https://doi.org/10.1117/12.721924

KEYWORDS: Gas sensors, Sensors, Silicon, Glasses, Deep reactive ion etching, Gases, Semiconducting wafers, System integration, Chromium, Palladium

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Proceedings Article | 15 May 2007 Paper

Fabrication and characterization of a passive silicon-based direct methanol fuel cell

J. Esquivel, N. Sabaté, J. Santander, N. Torres, C. Cané

Proceedings Volume 6589, 658903 (2007) https://doi.org/10.1117/12.721907

KEYWORDS: Silicon, Microfabrication, Deep reactive ion etching, Electrodes, Semiconducting wafers, Capillaries, Hydrogen, Electrons, Optical lithography, Liquids

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Proceedings Article | 11 April 2007 Paper

Measurement of stresses in MEMS structures by stress release

Dietmar Vogel, Neus Sabate, Astrid Gollhardt, Bernd Michel

Proceedings Volume 6528, 65280Y (2007) https://doi.org/10.1117/12.716291

KEYWORDS: Silicon, Ions, Thin films, Microelectromechanical systems, Digital image correlation, Chemical elements, Manufacturing, Packaging, Low pressure chemical vapor deposition, Silicon films

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Proceedings Article | 4 April 2006 Paper

FIB-based measurement of local residual stresses on microsystems

Dietmar Vogel, Neus Sabate, Astrid Gollhardt, Juergen Keller, Juergen Auersperg, Bernd Michel

Proceedings Volume 6175, 617505 (2006) https://doi.org/10.1117/12.658298

KEYWORDS: Digital image correlation, Silicon, Microsystems, Ion beams, Ions, Microelectromechanical systems, Photomicroscopy, Micromachining, Sensors, Manufacturing

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Proceedings Article | 1 July 2005 Paper

3D deformation analysis of flow and gas sensors membranes for reliability assessment

Neus Sabate, Juergen Keller, Astrid Gollhardt, Dietmar Vogel, Isabel Gracia, Carles Cane, Joan Ramon Morante, Bernd Michel

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608660

KEYWORDS: Sensors, Gas sensors, Reliability, Silicon, Platinum, 3D metrology, Temperature metrology, Digital image correlation, Atomic force microscopy, Scanning probe microscopy

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Proceedings Article | 9 May 2005 Paper

FIB based measurements for material characterization on MEMS structures

Dietmar Vogel, Daniel Lieske, Astrid Gollhardt, Juergen Keller, Neus Sabate, Joan Ramon Morante, Bernd Michel

Proceedings Volume 5766, (2005) https://doi.org/10.1117/12.599891

KEYWORDS: Digital image correlation, Ions, Scanning electron microscopy, Microelectromechanical systems, Ion beams, Material characterization, Image resolution, Sensors, Error analysis, Copper

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Proceedings Article | 24 April 2003 Paper

Compatibility of gas and flow sensor technology fabrication

Neus Sabate, Isabel Gracia, Carles Cane, Jordi Puigcorbe, Judith Cerda, Joan Ramon Morante, Javier Berganzo

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498995

KEYWORDS: Sensors, Gas sensors, Silicon, Platinum, Resistors, Electrodes, Temperature sensors, Sensor technology, Dielectrics, Semiconductors

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Proceedings Article | 19 April 2002 Paper

Low-cost thermal flow sensor for home-appliances applications

N. Sabate, Isabel Gracia, Carles Cane, J. Berganzo, J. Puicorbe, Juan Morante

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462855

KEYWORDS: Sensors, Resistors, Spatial light modulators, Packaging, Silicon, Electronics, Calibration, Finite element methods, Wheatstone bridges, Gas sensors

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Showing 5 of 13 publications

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