Dr. Nicholas V. LiCausi
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Optical lithography, Monte Carlo methods, Resistance, Capacitance, Lithography, Line edge roughness, Line width roughness, Double patterning technology

Proceedings Article | 17 April 2012 Paper
Proc. SPIE. 8352, 28th European Mask and Lithography Conference
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Optical inspection, Extreme ultraviolet, Reflectivity, Defect detection, Mirrors, Scanning electron microscopy, Defect inspection

Proceedings Article | 4 September 2008 Paper
Proc. SPIE. 7079, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics X
KEYWORDS: Sensors, Silicon, Boron, Capacitance, Deep reactive ion etching, Etching, Monte Carlo methods, Particles, Semiconducting wafers, Ions

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