Nickolas L. Brakensiek
Prinicpal Applications Engineer at Brewer Science Inc
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Particles, Ions, Silicon, Scanning electron microscopy, Aluminum, Plasma etching, Semiconducting wafers

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Nitrogen, Chemistry, Oxygen, Directed self assembly, Plasma etching, Carbon monoxide, Plasma

Proceedings Article | 3 May 2017 Presentation
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Optical lithography, Reflectivity, Computed tomography, Current controlled current source

Proceedings Article | 16 April 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Signal to noise ratio, Lithography, Multilayers, Optical lithography, Defect detection, Air contamination, Chemistry, Intelligence systems, Thin film coatings, Semiconducting wafers

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Carbon, Lithography, Metrology, Microfluidics, Particles, Silicon, Chemistry, Solids, Chemical elements, Semiconducting wafers

Showing 5 of 19 publications
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