Dr. Nicolas Benoit Profile

Dr. Nicolas Benoit

Coating Technology at Carl Zeiss Sports Optics GmbH

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Author

Publications (9)

Proceedings Article | 3 September 2008 Paper

Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Torsten Feigl, Sergiy Yulin, Marco Perske, Hagen Pauer, Mark Schürmann, Norbert Kaiser, Norbert Böwering, Oleg Khodykin, Igor Fomenkov, David Brandt

Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III

KEYWORDS: Mirrors, Multilayers, Annealing, Interfaces, Silicon, Coating, Reflectivity, Extreme ultraviolet, Molybdenum, Plasma

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Proceedings Article | 21 March 2008 Paper

Scattering of EUV optics: substrate, coating, and degradation effects

Sven Schröder, Nicolas Benoit, Torsten Feigl, Angela Duparré, Andreas Tünnermann

Proc. SPIE. 6921, Emerging Lithographic Technologies XII

KEYWORDS: Mirrors, Multilayers, Scattering, Interfaces, Coating, Reflectivity, Extreme ultraviolet, Scatter measurement, Autoregressive models, EUV optics

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Proceedings Article | 20 March 2008 Paper

Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser, Ming Fang, Manish Chandhok

Proc. SPIE. 6921, Emerging Lithographic Technologies XII

KEYWORDS: Carbon, Mirrors, Multilayers, Titanium dioxide, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Oxidation

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Proceedings Article | 29 August 2006 Paper

EUV multilayer mirrors with enhanced stability

Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proc. SPIE. 6317, Advances in X-Ray/EUV Optics, Components, and Applications

KEYWORDS: Mirrors, Multilayers, Annealing, Interfaces, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Oxidation

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Proceedings Article | 24 March 2006 Paper

High-temperature LPP collector mirror

Torsten Feigl, Sergiy Yulin, Nicolas Benoit, Norbert Kaiser, Norbert Böwering, Alex Ershov, Oleh Khodykin, John Viatella, Kent Bruzzone, Igor Fomenkov, David Myers

Proc. SPIE. 6151, Emerging Lithographic Technologies X

KEYWORDS: Mirrors, Multilayers, Annealing, Silicon, Coating, Reflectivity, Atomic force microscopy, Extreme ultraviolet, Silicon carbide, Temperature metrology

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Proceedings Article | 5 October 2005 Paper

Interface-engineered multilayer mirrors

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Proc. SPIE. 5963, Advances in Optical Thin Films II

KEYWORDS: Carbon, Mirrors, Multilayers, Annealing, Interfaces, Silicon, Diffusion, Reflectivity, Extreme ultraviolet lithography, Silicon carbide

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Proceedings Article | 6 May 2005 Paper

High-temperature multilayers

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Proc. SPIE. 5751, Emerging Lithographic Technologies IX

KEYWORDS: Mirrors, Multilayers, Optical properties, Annealing, Interfaces, Silicon, Optical coatings, Reflectivity, Transmission electron microscopy, Extreme ultraviolet

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Proceedings Article | 21 February 2005 Paper

New challenges for VUV-XUV radiation resistant coatings

Alexandre Gatto, Joerg Heber, Minghong Yang, Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proc. SPIE. 5647, Laser-Induced Damage in Optical Materials: 2004

KEYWORDS: Optical components, Thin films, Mirrors, Ultraviolet radiation, Optical coatings, Reflectivity, Micromirrors, Aluminum, Vacuum ultraviolet, Thin film coatings

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Proceedings Article | 27 January 2005 Paper

EUV/soft x-ray multilayer optics

Sergiy Yulin, Torsten Feigl, Nicolas Benoit, Norbert Kaiser

Proc. SPIE. 5645, Advanced Microlithography Technologies

KEYWORDS: Mirrors, Multilayers, X-ray optics, Sputter deposition, Interfaces, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum

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Showing 5 of 9 publications

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