Dr. Nikhil Tiwale
Research Associate at Brookhaven National Lab
SPIE Involvement:
Author
Area of Expertise:
Nanofabrication , Lithography , Atomic Layer Deposition (ALD) , Infiltration Synthesis , Field Effect Transistors
Profile Summary

◾Materials scientist adept in lithography & nanofabrication, semiconductor processing
◾8+ years of hands-on experience in cleanroom processing; materials & device characterization
◾Proficient in training cleanroom users & consulting on process development for over 3 years
◾Ability to manage independent & collaborative projects in interdisciplinary teams

𝗖𝗮𝗿𝗲𝗲𝗿 𝗜𝗻𝘁𝗲𝗿𝗲𝘀𝘁𝘀
◾Nanolithography & patterning: electron beam lithography (EBL), extreme ultraviolet (EUV) lithography, directed self-assembly (DSA), novel hybrid resists
◾Scalable innovative micro/nano-fabrication processes for (Opto-)electronic devices, display technology
◾Oxide semiconductors, organic/inorganic/hybrid semiconductors & dielectrics
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Oxides, Optical lithography, Etching, Metals, Silicon, Resistance, Extreme ultraviolet, Plasma etching, Nanolithography, Scanning transmission electron microscopy

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Etching, Atomic layer deposition, Extreme ultraviolet lithography

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