Mr. Nilesh S. Birari Profile

Nilesh S. Birari

at Indian Institute of Technology

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Publications (1)

Proceedings Article | 23 December 2003 Paper

Improvement in reliability of MEMS resonator using multi-layers

Prakash Apte, Priyadarshan Patankar, Nilesh Birari

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524442

KEYWORDS: Resonators, Microelectromechanical systems, Reliability, Silicon, Silica, Optical simulations, Oxides, Multilayers, Failure analysis, Silicon films

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