The thermal crosstalk effect severely limits the application of Vertical-Cavity Surface-Emitting Laser (VCSEL) array. In this paper, using the high transparency and ultra-fast mobility of graphene, we have designed a VCSEL array with graphene electrode (Gr-VCSEL array). By avoiding lateral transport of current, the series resistance and self-heating of Gr-VCSEL are reduced. Compared with traditional VCSEL array, the 10×10 Gr-VCSEL array achieves a 20.6% reduction in series resistance and a 26% decrease in red-shift rate of wavelength. Benefit by the high thermal conductivity of graphene electrode, the thermal resistance of Gr-VCSEL array is reduced by 7.8%. This structure has excellent thermal properties and is not limited by wavelength, which provides a new method for the development of VCSEL array.
High-temperature operating characteristics and polarization stability are important for VCSEL as an atomic clock light source. In this study, the polarization-stable single-mode 795 nm VCSEL with anisotropic aperture was successful fabricated by controlled the asymmetric airflow distribution and the different oxidation rates of the crystal direction. The oxidation of different crystal direction of asymmetric oxidation aperture with time is summarized. The surface electric fields of the traditional circular oxidation aperture VCSEL(C-VCSEL) and diamond shape oxidation aperture VCSEL(D-VCSEL) with different aperture sizes are investigated by simulation, and then the cause of the anisotropy of D-VCSEL is explored. The special anisotropic oxidation aperture of the device makes it have stable polarized characteristics. The demonstrated D-VCSEL with dimensions of 3.6 μm × 4.8 μm, achieving an orthogonal polarization suppression ratio (OPSR) exceeding 30 dB while maintaining low threshold and high single-mode output even at temperatures up to 80 °C.
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