Dr. Nitish Kumar Profile

Dr. Nitish Kumar

Researcher at Technische Univ Delft

SPIE Involvement:

Author

Area of Expertise:

Optical Scatterometry , Diffraction , Inverse problems in optics , Phase retrieval , Optical metrology , Aberration retrieval through ENZ

Publications (8)

Proceedings Article | 21 June 2015 Paper

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

P. Petrik, B. Fodor, E. Agocs, P. Kozma, J. Nador, N. Kumar, J. Endres, G. Juhasz, C. Major, S. Pereira, T. Lohner, H. P. Urbach, B. Bodermann, M. Fried

Proceedings Volume 9526, 95260S (2015) https://doi.org/10.1117/12.2184833

KEYWORDS: Ellipsometry, Scatterometry, Spectroscopy, Spectroscopic ellipsometry, Thin films, Solids, Silicon, Applied physics, Semiconductors, Atomic force microscopy

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Proceedings Article | 1 May 2014 Paper

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

J. Endres, N. Kumar, P. Petrik, M. Henn, S. Heidenreich, S. Pereira, H. Urbach, B. Bodermann

Proceedings Volume 9132, 913208 (2014) https://doi.org/10.1117/12.2052819

KEYWORDS: Scatterometry, Deep ultraviolet, Diffraction, Oxides, Silicon, Scatter measurement, Polarization, Data modeling, Statistical analysis, Error analysis

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Proceedings Article | 8 March 2014 Paper

Optical characterization of laterally and vertically structured oxides and semiconductors

P. Petrik, N. Kumar, E. Agocs, B. Fodor, S. Pereira, T. Lohner, Mi. Fried, H. Urbach

Proceedings Volume 8987, 89870E (2014) https://doi.org/10.1117/12.2042181

KEYWORDS: Ellipsometry, Spectroscopy, Scatterometry, Zinc oxide, Oxides, Dielectrics, Polarimetry, Light sources, Spectroscopic ellipsometry, Image resolution

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Proceedings Article | 13 May 2013 Paper

Phase information in coherent Fourier scatterometry

N. Kumar, O. El Gawhary, S. Roy, S. Pereira, H. Urbach

Proceedings Volume 8788, 87881P (2013) https://doi.org/10.1117/12.2020506

KEYWORDS: Polarization, Scatterometry, Information operations, Computer simulations, Photovoltaics, Semiconductors, Optical metrology, Light emitting diodes, Diffraction gratings, Collimation

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Proceedings Article | 26 November 2012 Paper

Experimental techniques for aberration retrieval with through-focus intensity images

S. Pereira, A. Wiegmann, N. Kumar, A. da Costa Assafrao, A. Polo, L. Wei, S. van Haver

Proceedings Volume 8557, 855706 (2012) https://doi.org/10.1117/12.2000376

KEYWORDS: CCD cameras, Diffraction, Imaging systems, Objectives, Calibration, Digital video discs, Direct methods, Interferometry, Lenses, Collimation

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Proceedings Article | 3 April 2012 Paper

Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrology

N. Kumar, O. El Gawhary, S. Roy, V. Kutchoukov, S. Pereira, W. Coene, H. Urbach

Proceedings Volume 8324, 83240Q (2012) https://doi.org/10.1117/12.916357

KEYWORDS: Scatterometry, Metrology, Semiconductors, Diffraction gratings, Sensors, Data modeling, Wavefronts, Charge-coupled devices, Silicon, Collimation

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Proceedings Article | 11 August 2008 Paper

Tomographic studies of 3D refractive index and birefringence distribution in M-O elements replicated by hot embossing technology

Malgorzata Kujawinska, Rafal Krajewski, Nitish Kumar, Juergen Mohr, Hugo Thienpont

Proceedings Volume 7064, 70640H (2008) https://doi.org/10.1117/12.798318

KEYWORDS: Refractive index, Tomography, Birefringence, Glasses, 3D metrology, Head, Prototyping, Interferometry, Photoelasticity, Optical components

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Proceedings Article | 17 September 2007 Paper

Laser emission from dye mixture doped polymer optical fiber

Sheeba Nambiar, Thomas Kannampuzha Jhony, Rajesh Mandamparambil, Nitish Kumar, Praveen Ashok, Vadakedathu Nampoori, Radhakrishnan Padmanabhan

Proceedings Volume 6698, 66981O (2007) https://doi.org/10.1117/12.732823

KEYWORDS: Rhodium, Polymer optical fibers, Fiber lasers, Rhodamine B, Rhodamine, Energy transfer, Luminescence, Dye lasers, Polymethylmethacrylate, Phase only filters

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Showing 5 of 8 publications

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