Dr. Noah Bareket Profile

Dr. Noah Bareket

at Abbott Medical Optics

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 22 January 2001 Paper

UV inspection of EUV and SCALPEL reticles

Donald Pettibone, Noah Bareket, Ted Liang, Alan Stivers, Scott Hector, Pawitter Mangat, Douglas Resnick, Michael Lercel, Mark Lawliss, Christopher Magg, Anthony Novembre, Reginald Farrow

Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology

KEYWORDS: Reticles, Ultraviolet radiation, Silicon, Inspection, Reflectivity, Chromium, Photomasks, Extreme ultraviolet, Semiconducting wafers, Charged-particle lithography

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Proceedings Article | 19 July 2000 Paper

Next-generation lithography mask inspection

Noah Bareket, Steve Biellak, Donald Pettibone, Stanley Stokowski

Proc. SPIE. 4066, Photomask and Next-Generation Lithography Mask Technology VII

KEYWORDS: Lithography, Multilayers, Defect detection, Glasses, Particles, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Semiconducting wafers

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Proceedings Volume Editor (1)

SPIE Conference Volume | 1 August 1983

Wavefront Sensing

Conference Committee Involvement (1)

Wavefront Sensing

24 August 1982 | San Diego, United States

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