Norbert B. Koster
Principal Scientist at TNO
SPIE Involvement:
Author
Publications (22)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Thermography, Mirrors, Imaging systems, Reflectivity, Diagnostics, Pellicles, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Diffraction gratings

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Mirrors, Contamination, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Temperature metrology

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Reticles, Lifetime testing equipment, Cameras, Scintillators, Photodiodes, Optical testing, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics

Proceedings Article | 28 September 2017 Paper
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reticles, Optical coherence tomography, Particles, Inspection, Pellicles, Photomasks, Extreme ultraviolet, Optics manufacturing, Contamination control, EUV optics

Proceedings Article | 13 July 2017 Paper
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Mirrors, Reticles, Metrology, Statistical analysis, Scanners, Scintillators, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Contamination control, Ruthenium, EUV optics

Showing 5 of 22 publications
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