Prof. Norbert Schwesinger Profile

Prof. Norbert Schwesinger

at Technische Univ München

SPIE Involvement:

Author

Area of Expertise:

energy harvesting , piezoelectricity , microfluidic , Si-Technology , micro sensors

Profile Summary

Norbert Schwesinger studied Electrical Engineering from 1973-1977 and got his PhD in 1983 at the Faculty of Electrical Engineering at the TH Ilmenau. Then he was working as a development engineer, first at Relay Technique Grossbreitenbach and second at Robotron Sömmerda. In 1992 he became director of the Microsystems Technology Laboratories at the Technical University of Ilmenau. Since 2001 he is professor at the Technical University of Munich, Faculty of Electrical Engineering and Information Technology, Department of Micro-structured Mechatronic Systems. His research activities are focused on multiple micro-components. Particular attention is paid to the areas of microfluidics, microsensors for mechanical parameters and energy harvesting with micro-structured components.

Publications (22)

Proceedings Article | 20 April 2022 Presentation + Paper

Presentation + Paper

Contribution of converse flexoelectric effect in PZT ceramics in presence of strong electrical fields

Lars Seyfert, Norbert Schwesinger, Andrej Voss, Werner Hemmert

Proceedings Volume 12043, 120430L (2022) https://doi.org/10.1117/12.2612559

KEYWORDS: Electrodes, Ferroelectric materials, Temperature metrology, Ceramics, Dielectrics, Actuators, Piezoelectric effects, Dielectric polarization, Signal detection, Sensors

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Proceedings Article | 18 April 2022 Presentation + Paper

Presentation + Paper

Stroboscopic video microscopy with sub-nanometer accuracy for characterizing and monitoring MEMS

Andrej Voss, Lars Seyfert, Norbert Schwesinger, Werner Hemmert

Proceedings Volume 12047, 1204712 (2022) https://doi.org/10.1117/12.2612552

KEYWORDS: Laser Doppler velocimetry, Ferroelectric materials, Microelectromechanical systems, Video microscopy, Time metrology, Motion estimation, Vibrometry, Doppler effect, Cameras

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Proceedings Article | 22 March 2021 Presentation + Paper

Presentation + Paper

Contribution of flexoelectricity in piezoelectric PVDF films for EH applications

Lars Seyfert, Hassen ben Ammaa, Norbert Schwesinger

Proceedings Volume 11588, 115880E (2021) https://doi.org/10.1117/12.2581560

KEYWORDS: Ferroelectric polymers, Polymers, Polymer thin films, Dielectrics, Temperature metrology, Piezoelectric effects, Energy harvesting, Dielectric polarization, Capacitance, Thermoelectric materials

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Proceedings Article | 19 May 2020 Presentation + Paper

Presentation + Paper

Verification of the flexoelectric effect in PET polymer films for EH applications

Lars Seyfert, Lukas Moritz, Hassen ben Ammar, Norbert Schwesinger

Proceedings Volume 11376, 113761T (2020) https://doi.org/10.1117/12.2558027

KEYWORDS: Electrodes, Polymers, Polymer thin films, Dielectrics, Actuators, Amplifiers, Dielectric polarization, Ferroelectric polymers, Piezoelectric effects, Energy harvesting

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Proceedings Article | 21 March 2019 Presentation + Paper

Presentation + Paper

Possibilities of using flexoelectric effect for energy harvesting applications

Lars Seyfert, Alexander Henneberg, Norbert Schwesinger

Proceedings Volume 10967, 109671C (2019) https://doi.org/10.1117/12.2516746

KEYWORDS: Polymers, Capacitance, Silicon, Polymer thin films, Energy harvesting, Dielectrics, Positron emission tomography, Sensors, Electrodes, Dielectric polarization

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Proceedings Article | 18 March 2019 Paper

Paper

Piezoelectric pressure harvester for autonomous sensors

Sherif Keddis, Norbert Schwesinger

Proceedings Volume 10973, 1097304 (2019) https://doi.org/10.1117/12.2516353

KEYWORDS: Ferroelectric polymers, Sensors, Ferroelectric materials, Multilayers, Piezoelectric effects, Buildings, Electrodes, Capacitors

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Proceedings Article | 15 March 2018 Presentation + Paper

Presentation + Paper

Piezoelectric flow harvesting for in-pipe metering systems

Sherif Keddis, Rafik Mitry, Norbert Schwesinger

Proceedings Volume 10595, 105950P (2018) https://doi.org/10.1117/12.2297095

KEYWORDS: Sensors, Ferroelectric polymers, Water, Power supplies, Energy harvesting, Wind energy, Aluminum, Electrodes, Sensor networks

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Proceedings Article | 15 April 2016 Presentation + Paper

Presentation + Paper

Power source for wireless sensors in pipes

Sherif Keddis, Norbert Schwesinger

Proceedings Volume 9799, 979916 (2016) https://doi.org/10.1117/12.2222416

KEYWORDS: Energy harvesting, Sensors, Ferroelectric polymers, Electrodes, Aluminum, Liquids, Wind energy, Water, Transceivers, Ferroelectric materials, Resistance, Data transmission

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In this paper, we present investigations on wireless sensors for fluid control inside a pipe. Autarkic sensors are in the technical trend. They are typically connected with a transceiver unit for data transmission. Sensors usually need a lower amount of energy than data transceivers. Therefore, they are commonly supplied via wires or batteries with electricity. With common technologies, this request leads to high requirements on tightness in liquids since poor sealing could easily lead to failures. Replacement of batteries inside pipes is complicated and almost accompanied by a flow interruption. The application of energy harvesters as power supply is therefore a good alternative. In our studies we used flexible piezoelectric energy harvesters of PVDF (Poly-Vinylidene-Di-Fluoride). All harvesting units consist of piezoelectric PVDF-foils as active layers and Aluminum-foils as electrodes. The layers were stacked alternating on each other and wound to a spool. A LDPE-film wraps the spool and prevents the inflow of liquids. The device has following parameters:

No. of windings: 4 in air, 4, 5, 7 in water

Dimensions: 15 mm Ø 22mm

Materials: PDVF: 25μm; Aluminimum: 6μm, LDPE: 25μm

A ring shaped bluff body was placed inside the pipe to induce turbulence in the fluid stream. As the harvesters have been arranged downstream of the bluff body, they were forced to oscillate independent of the media. In each case, deformation of the active layers led to a polarization and a separation of electrical charges. Experiments were carried out in a wind channel as well as in a water pipe. In air, the spool oscillates with a frequency of about 30Hz, at a wind speed of about 7m/s. A -Voltage of about 4V (peak-peak) was measured. This delivers in case of power adjustment, power values of about 0.54μW. In water, the velocity of the fluid was limited to nearly one tenth. Oscillation starts only at a water speed above 0.6m/s. The average oscillation frequency is about 18Hz. At a velocity of 0.74m/s, a peak-peak-Voltage up to about 2.3V was found. In case of impedance adjustment, the power was about 0.33μW. This power is stored in a capacitor. Assuming a data transmission unit consumes about 0.2 mWs during one operational period of 1 second, the duty cycle time can be calculated to about 6.2 minutes for air harvesting and 10.1 minutes for harvesting in water.

Proceedings Article | 10 March 2014 Paper

Paper

Electret properties of PVDF film material: flexible and lightweight energy harvesting device

Enrico Bischur, Norbert Schwesinger

Proceedings Volume 9057, 90571X (2014) https://doi.org/10.1117/12.2045089

KEYWORDS: Ferroelectric polymers, Electrodes, Aluminum, Capacitance, Multilayers, Energy harvesting, Capacitors, Instrument modeling, Fabrication, Resistors

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Proceedings Article | 17 May 2013 Paper

Paper

Simulation of thick film PZT actuators with interdigitated electrodes

Mohanad Zaki, Sandy Zähringer, Norbert Schwesinger

Proceedings Volume 8763, 876338 (2013) https://doi.org/10.1117/12.2017411

KEYWORDS: Actuators, Electrodes, Ferroelectric materials, Stars, Finite element methods, Silver, Metals, Ceramics, Piezoelectric effects, Matrices

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Proceedings Article | 10 April 2013 Paper

Paper

Piezoelectric PVDF film energy harvester for powering a wireless sensor system

E. Bischur, N. Schwesinger

Proceedings Volume 8688, 868804 (2013) https://doi.org/10.1117/12.2009610

KEYWORDS: Capacitors, Dielectric polarization, Ferroelectric polymers, Sensors, Energy harvesting, Standards development, Bridges, Data transmission, Transceivers, Dielectric breakdown

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Proceedings Article | 27 April 2011 Paper

Paper

Piezoelectric energy harvester under parquet floor

E. Bischur, N. Schwesinger

Proceedings Volume 7977, 79770M (2011) https://doi.org/10.1117/12.880419

KEYWORDS: Wind energy, Ferroelectric polymers, Energy harvesting, Capacitors, Electrodes, Aluminum, Manufacturing, Ferroelectric materials, Piezoelectric effects, Polarization

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Proceedings Article | 12 April 2010 Paper

Paper

Piezoelectric energy harvester operating in flowing water

E. Bischur, S. Pobering, M. Menacher, N. Schwesinger

Proceedings Volume 7643, 76432Z (2010) https://doi.org/10.1117/12.847532

KEYWORDS: Wind energy, Switches, Energy harvesting, Capacitors, Analog electronics, Electrodes, Logic, Switching, Control systems, Light emitting diodes

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Proceedings Article | 19 May 2009 Paper

Paper

What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection

Sandy Zähringer, Norbert Schwesinger

Proceedings Volume 7362, 73620L (2009) https://doi.org/10.1117/12.821320

KEYWORDS: Electrodes, Polarization, Actuators, Ferroelectric materials, Ceramics, Interferometers, Piezoelectric effects, Stars, Microscopes, Semiconducting wafers

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Proceedings Article | 7 April 2009 Paper

Paper

Generation of electrical energy using short piezoelectric cantilevers in flowing media

S. Pobering, S. Ebermeyer, N. Schwesinger

Proceedings Volume 7288, 728807 (2009) https://doi.org/10.1117/12.815189

KEYWORDS: Wind energy, Sensors, Ferroelectric materials, Electrodes, Solar energy, Energy harvesting, Strontium, Resistance, Systems modeling, Ceramics

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Proceedings Article | 17 January 2003 Paper

Paper

Emulsions on demand using microstructured devices

Christian Mahe, Jean Francois Tranchant, Melanie Tromeur, Norbert Schwesinger

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.478160

KEYWORDS: Liquids, Silicon, Skin, Microfluidics, Glasses, Semiconducting wafers, Photoresist processing, Chemical reactions, Photomasks, Wafer bonding

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Proceedings Article | 18 August 2000 Paper

Paper

Modular microcomponents for a flexible chemical process technology

Norbert Schwesinger

Proceedings Volume 4177, (2000) https://doi.org/10.1117/12.395673

KEYWORDS: Chemical reactions, Microfluidics, Silicon, Wet etching, Standards development, Connectors, Power supplies, Sensors

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Proceedings Article | 10 September 1998 Paper

Paper

Micropump for viscous liquids and muds

Norbert Schwesinger, Sasha Bechtel

Proceedings Volume 3515, (1998) https://doi.org/10.1117/12.322080

KEYWORDS: Liquids, Microfluidics, Silicon, Micromachining, Particles, Manufacturing, Wet etching

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Proceedings Article | 5 September 1997 Paper

Paper

Wet chemical isotropic etching procedures of silicon: a possibility for the production of deep-structured microcomponents

Norbert Schwesinger, Arne Albrecht

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284467

KEYWORDS: Etching, Silicon, Isotropic etching, Industrial chemicals, Silicon films, Metals, Photoresist materials, Dry etching, Anisotropic etching

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Proceedings Article | 23 September 1996 Paper

Paper

Influence of gas composition and the mask materials on the etch profile of dry-etched structures in silicon

Norbert Schwesinger, Ivan Hotovy, Torsten Saendig, Alexander Pelzus

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251236

KEYWORDS: Etching, Silicon, Anisotropy, Chromium, Plasma, Copper, Dry etching, Reactive ion etching, Nickel, Gases

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In the field of micromachining dry etching processes of silicon are getting more and more important in view of applications. By means of RIE processes it is possible to achieve structures with a very high aspect ratio. This is interesting especially in comparison with the well known but expensive LIGA technique. Unfortunately the anisotropy of the profile in silicon depends strongly on different process conditions. Therefore experiments were carried out with variations in the gas composition, the plasma power and the mask materials. All investigations were made in a 310-type machine from STS. The gas composition was made of SF₆, O₂ and CHF₃. The flow rate of these gases was varied in a wide range. The power of the plasma was hanged from 75W up to 600W at a frequency of 13,56MHz. Aluminium, copper, nickel and chromium were used as masking materials. The width of the patterns was in a range of > 20 micrometers. In contradiction to results known from literature it was not simple to achieve structures with vertical sidewalls. Using aluminium as materials, the sidewalls were rounded independent of the power and the composition of the gas. In some cases a small redeposition was observable at the bottom of the structures. A kind of microgas was observed, too. Copper showed high etch rates in some gas compositions and at defined power conditions. Therefore a complete removing of the masking layer was observed in some cases. Some material was redeposited in the transition zone between the sidewalls and the bottom. The structures showed rounded edges and no vertical sidewalls. A higher redeposition rate was found using nickel as masking material. Unfortunately this redeposition occurred at the bottom of the structures. This is measurable in a decrease of the etch rate. The structures are rounded with a kind of vertical sidewalls. Anisotropic structures with vertical sidewalls were observed with chromium as mask layer. The anisotropic etch behavior with a high aspect ratio was achieved only in a small range of the gas composition and the plasma power.

Proceedings Article | 19 September 1995 Paper

Paper

Deposition of thick zinc oxide films with a high resistivity

Norbert Schwesinger, Heike Bartsch, Frank Moeller

Proceedings Volume 2639, (1995) https://doi.org/10.1117/12.221290

KEYWORDS: Zinc oxide, Sputter deposition, Argon, Crystals, Plasma, Silicon, Transducers, Oxygen, Scanning electron microscopy, Thin films

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Proceedings Article | 15 September 1995 Paper

Paper

Static micromixer built up in silicon

Norbert Schwesinger, Thomas Frank

Proceedings Volume 2642, (1995) https://doi.org/10.1117/12.221163

KEYWORDS: Liquids, Chemical elements, Silicon, Semiconducting wafers, Sensors, Microfluidics, System integration, Etching, Chemical analysis, Diffusion

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Showing 5 of 22 publications

Conference Committee Involvement (12)

Active and Passive Smart Structures and Integrated Systems XV

8 March 2021 | Online Only, California, United States

Active and Passive Smart Structures and Integrated Systems XIV

27 April 2020 | Online Only, California, United States

Active and Passive Smart Structures and Integrated Systems XIII

4 March 2019 | Denver, Colorado, United States

Active and Passive Smart Structures and Integrated Systems XII

5 March 2018 | Denver, Colorado, United States

Active and Passive Smart Structures and Integrated Systems XI

26 March 2017 | Portland, Oregon, United States

Showing 5 of 12 Conference Committees

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