Ms. Noriko Yamashita Profile

Noriko Yamashita

at FUJIFILM Corp

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Author

Publications (2)

Proceedings Article | 25 September 2010 Paper

Duplicated templates for discrete track media

Atsushi Tatsugawa, Noriko Yamashita, Tadashi Oomatsu, Kenji Saitou, Takashi Katou, Toshihide Ishioka, Kazuyuki Usuki

Proceedings Volume 7823, 78233L (2010) https://doi.org/10.1117/12.864192

KEYWORDS: Quartz, Nickel, Silicon, Servomechanisms, Nanoimprint lithography, Reactive ion etching, Ultraviolet radiation, Line width roughness, Semiconducting wafers, Photomasks

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Proceedings Article | 23 September 2009 Paper

Duplicated quartz template for 2.5 inch discrete track media

Noriko Yamashita, Tadashi Oomatsu, Satoshi Wakamatsu, Katsuhiro Nishimaki, Toshihiro Usa, Kazuyuki Usuki

Proceedings Volume 7488, 74880W (2009) https://doi.org/10.1117/12.833466

KEYWORDS: Quartz, Etching, Nanoimprint lithography, Silicon, Photomasks, Photoresist processing, Reactive ion etching, Scanning electron microscopy, Resistance, Lithography

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