Our work demonstrates a MEMS based handheld dual-axis confocal microscope for cervical cancer screening. Imaging demonstration is performed with plant and animal tissue biopsies. The data is collected and displayed in real time with 2-5 Hz frame rates.
We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.
Several applications of optical micromirrors need synchronization of its mechanical oscillation with an external control
signal. Self-sustained oscillation of micromirrors is a prerequisite for achieving such synchronization. To suppress its
mechanical deformation these micromirrors are operated under atmospheric or controlled pressure environment.
Operation under this environment leads to increase in driving voltages to achieve required deflections. However,
significant parasitic crosstalk due to these high driving voltages presents a challenge for achieving their self-sustained
oscillations. In this paper, stable self-sustained oscillation of a 13.5kHz micromirror is achieved at atmospheric pressure
by actively suppressing its crosstalk. Frequency stability of 7.2ppm is obtained for this micromirror's self-sustained
oscillation at atmospheric pressure.
A microelectromechanical torsional oscillator was used to obtain new constraints in the search for new Yukawa-like
interactions at the ~ 100 nm range. A new heterodyne technique was used to enhance the possible contributions of
hypothetical forces, while electromagnetic interactions (including the ones associated with vacuum fluctuations),
remained the same. In particular, the force between a Au-coated sphere and a Au film deposited on the oscillator was
subtracted in situ from the force between the same sphere and a composite film made out of Ge and Au. The
combination of the high quality factor Q of the oscillator and this new approach that greatly reduced the Casimir
background yielded improvements in the constraints close to one order of magnitude over the 50-400 nm interaction
We review the fabrication process of a recently introduced phase only MEMS based spatial light modulators for
maskless lithography. A brief description of this device is presented. The physical properties of its structural layers and
the difficulties encountered during its fabrication process are described in detail.
We present a new MEMS mirror device that fulfills the requirements
needed for its use in a wavelength selective switch.
The MEMS device consists of a 1D array of individually
controllable tilt micromirrors with almost 100% filling factor.
Each mirror in the array is used to manipulate an individual
wavelength channel, attenuating or redirecting it into a
different output. The mirrors are electrostatically rotated
around a fixed pivot and they use a novel concept of angle
amplification to increase their out-of-plane angular rotation.
A detailed analysis of their mechanical and optical response is