Ofir Gan
at Micron Israel
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 February 2012 Paper
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Lithography, Data modeling, Calibration, Etching, Silicon, Manufacturing, Photoresist materials, Transmittance, Photomasks, Semiconducting wafers

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