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Olalla Varela Pedreira
at imec
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Publications (3)
Proceedings Article | 25 May 2022 Presentation + Paper
Buried power rail integration for CMOS scaling beyond the 3 nm node
A. Gupta, Z. Tao, D. Radisic, H. Mertens, O. Varela Pedreira, S. Demuynck, J. Bömmels, K. Devriendt, N. Heylen, S. Wang, K. Kenis, L. Teugels, F. Sebaai, C. Lorant, N. Jourdan, B. Chan, S. Subramanian, F. Schleicher, A. Peter, N. Rassoul, Y. Siew, B. Briggs, D. Zhou, E. Rosseel, E. Capogreco, G. Mannaert, A. Sepúlveda, E. Dupuy, K. Vandersmissen, B. Chehab, G. Murdoch, E. Altamirano Sanchez, S. Biesemans, Zs. Tőkei, E. Dentoni Litta, N. Horiguchi
Proceedings Volume 12056, 120560B (2022) https://doi.org/10.1117/12.2615641
KEYWORDS: Ruthenium, Metals, Molybdenum, Etching, Tungsten, Front end of line, Chemical mechanical planarization, Silicon
Proceedings Article | 19 May 2009 Paper
New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer level
Ingrid De Wolf, Jeroen De Coster, Vladimir Cherman, Piotr Czarnecki, Stanislaw Kalicinski, Olalla Varela Pedreira, Sandeep Sangameswaran, Kris Vanstreels
Proceedings Volume 7362, 73620N (2009) https://doi.org/10.1117/12.820977
KEYWORDS: Microelectromechanical systems, Switches, Reliability, Semiconducting wafers, Resonators, Dielectrics, Resistance, Doppler effect, Micromirrors, Electrical breakdown
Proceedings Article | 3 October 2008 Paper
High throughput measurement techniques for wafer level yield inspection of MEMS devices
O. Varela Pedreira, T. Lauwagie, J. De Coster, L. Haspeslagh, A. Witvrouw, I. De Wolf
Proceedings Volume 7155, 71550M (2008) https://doi.org/10.1117/12.814724
KEYWORDS: Lithium, Inspection, Image segmentation, Semiconducting wafers, Microelectromechanical systems, Mirrors, Measurement devices, Image processing, Micromirrors, Microscopes
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