Ni/Y2O3/4H-SiC metal-oxide-semiconductor (MOS) structure has been realized on 20 μm thick 4H-SiC epitaxial layers by depositing 40 nm thick Y2O3 layers through pulsed laser deposition and using nickel as the gate contact. 4H-SiC based MOS structures with thin oxide layers are being considered as novel detector structures for ionizing radiation. Y2O3 being a wide bandgap (5.5 eV) and high-𝑘 dielectric (𝑘 = 14-16) is beneficial to lower the junction leakage current and increasing the bias voltage limit. The current-voltage (I-V) characteristics recorded for the fabricated MOS devices revealed excellent rectification properties and a very low leakage current density of 80 pA/cm2 at a gate bias of -500 V. The Mott-Schottky plot obtained from high frequency (1 MHz) capacitance-voltage (C-V) measurement revealed a linear trend as observed in Ni/4H-SiC Schottky barrier detectors. A built-in potential of ≈2.0 V has been calculated from the C-V characteristics. The radiation detection properties of the MOS detectors have been assessed through pulse height spectroscopy using a 241Am alpha particle source. The detectors revealed a well-defined peak in the pulse height spectrum with an energy resolution of 1.6% and a charge collection efficiency (CCE) of 82% at 0 V applied bias (self-biased mode) for the 5486 keV alpha particles. The energy resolution and the charge collection efficiency were seen to improve further with increased gate bias. A CCE of 1.0 and an energy resolution of 0.4% has been observed when the MOS detector was biased at -50 V. A very long hole diffusion length of 56 μm has been calculated using a drift-diffusion model and the variation of experimentally obtained CCE with bias voltage. Such long hole diffusion length and the high built-in potential has led to the highefficiency detection performance in self-biased mode. Capacitance-mode deep level transient spectroscopy revealed the presence of deep level trap centers commonly observed in 4H-SiC epilayers with trap concentrations similar to that has been observed in our previous devices.
Thick 4H-SiC epitaxial layers are essential for high-resolution detection of x- and gamma-rays in harsh environment. In this work, we have fabricated high-resolution Ni/n-4H-SiC Schottky barrier radiation detectors on 250 μm epitaxial layers, the highest thickness ever reported. Capacitance-voltage (C-V) measurements showed a low-carrier concentration of ≈2 × 1014 cm-3 which based on simulations of the electric field allow the detectors to be fully depleted without break down. Current-voltage (I-V) characteristics displayed low leakage currents of < 1 nA up to − 800 V. To predict how the leakage current will grow at the large biases needed to fully deplete the detectors (at ~ 10 kV), the barrier lowering was evaluated from the detectors’ ln J/Em vs. E1/2m plots. Several detectors displayed scaling factors ≈ 2 or greater suggesting that leakage current should remain low even at extreme bias. Pulse height spectrometry using 5486 keV alpha particles showed a resolution of < 0.5 % full width half maximum (FWHM). From the charge collection efficiency vs. applied bias characteristics, the minority carrier diffusion length was found to be >10 μm. Both the long minority carrier diffusion length and high resolution were correlated to the low concentration of lifetime killing defects Z1/2 and EH6/7 (both associated with different charge states of carbon vacancy) found in the detector’s DLTS spectra
Silicon carbide (SiC) is the only wide-bandgap semiconductor to possess native oxide layer thus favoring efficient fabrication of metal-oxide-semiconductor (MOS) devices. 4H-SiC MOS structure has recently been demonstrated as improved radiation detector compared to the conventional Schottky barrier architecture. We report the fabrication of vertical Au/SiO2/n-4H-SiC MOS capacitors for radiation detection, by dry-oxidation of 20 μm thick n-type 4H-SiC epitaxial layer in air at 1000°C. Charge-carrier traps (defects) are known to limit the performance of semiconductor devices. In order to characterize the defects, capacitance mode deep level transient spectroscopy (C-DLTS) was carried out. Apart from regular electron-traps e.g., Ti-impurity and Z1/2 sites, we have also observed the carbon-interstitial related hole traps HK3. While studying defect centers in these devices using a filling pulse peaking to 0 V from a quiescent reverse gate voltage VG = -4 V, we observed a robust positive peak centered around 650 K. Positive peaks in C-DLTS scan indicates minority-carrier trapping, although above-mentioned type of filling pulses does not populate minority-carrier trap centers normally. The activation energy of the observed trap, most likely a carbon vacancy (HK3), was calculated to be 1.27 eV above the valence band edge.
Radiation detectors in planar configuration has been fabricated using CVD grown single crystalline diamond detectors. The detectors exhibited high energy-resolution for both electrons and holes transport. The performance of the diamond detectors was found to be asymmetric with respect to the bias polarity. The optimized charge collection efficiency values and the electronic noise analysis suggested the performance of the detectors is limited by the presence of electrically active defects such as nitrogen impurity. Density functional theory-based defect calculations has been performed to determine the location within the bandgap of the plausible defects that might interfere with the charge transport.
CdxZn1-xTe1-ySey (CZTS) is an emerging wide bandgap semiconductor material for the applications of high-resolution room-temperature x-ray and gamma-ray detectors. Large volume Cd0.9Zn0.1Te1-ySey single crystal ingots were grown by vertical Bridgman technique with composition 𝑦 = 0.02, 0.03, 0.05, and 0.07. Several planar detectors were fabricated on single grain cut out from the grown ingots and characterized. Current-voltage (I-V) measurements revealed very low leakage current (≤ 1 nA) at an operating bias voltage of ≥ 100 V and a bulk resistivity of ~1010 Ω-cm. X-ray diffraction (XRD) results showed sharp diffraction peaks, which confirmed a highly crystalline structure of the grown crystals. Energy dispersive x-ray spectroscopy (EDX) showed uniform elemental distribution over a large area and confirmed the stoichiometry of the samples. While all the detectors showed response to alpha particles, the detector with composition 𝑦 = 0.03 showed very good 137Cs (662 keV) gamma response. The drift mobility and mobility-lifetime product in all the samples of those compositions were calculated for both electrons and holes. Pulse height spectroscopy using 137Cs on the fabricated detectors showed fully resolved 662 keV gamma peaks with an energy resolution of ~2%. A one-to-one correlation between the space charge limited current (SCLC) flow and radiation detection properties was found to exist in these crystals. An anomalous current flow mechanism, falling outside the comprehension of SCLC flow mechanism, has been observed in the rest of the samples. The anomalous behavior has been attributed to the presence of electron traps.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.