Ms. Pallavi Puttarame Puttarame Gowda Profile

Pallavi Puttarame Puttarame Gowda

at imec

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Publications (2)

SPIE Journal Paper | 2 August 2023 Open Access

Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence

Janusz Bogdanowicz, Yusuke Oniki, Karine Kenis, Pallavi Puttarame Gowda, Hans Mertens, Basel Shamieh, Yonatan Leon, Matthew Wormington, Juliette Van der Meer, Anne-Laure Charley

JM3, Vol. 22, Issue 03, 034001, (August 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.034001

KEYWORDS: Germanium, Gallium arsenide, Transmission electron microscopy, Semiconducting wafers, Nanosheets, X-rays, Silicon, Etching, Transistors, Fluorescence

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Proceedings Article | 13 June 2022 Presentation

Highly selective isotropic chemical dry etching for gate-all-around devices: nanosheet, forksheet and complementary FETs

Yusuke Muraki, Yusuke Oniki, Pallavi Gowda, Efrain Altamirano-Sánchez, Hans Mertens, Naoto Horiguchi, Frank Holsteyns, Subhadeep Kal, Cheryl Alix, Kaushik Kumar, Aelan Mosden, Trace Hurd, Nobuyuki Takahashi

Proceedings Volume PC12056, PC1205604 (2022) https://doi.org/10.1117/12.2613723

KEYWORDS: Field effect transistors, Etching, Dry etching, Very large scale integration, Isotropic etching, Dielectrics, Gallium arsenide, Transistors, Superlattices, Sodium

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