Dr. Paolo A. Gargini
Chairman
SPIE Involvement:
Conference Chair | Author | Editor
Publications (6)

Proceedings Article | 10 April 2024 Open Access Presentation
Proceedings Volume PC12953, PC1295305 (2024) https://doi.org/10.1117/12.3029489

Proceedings Article | 1 December 2023 Presentation + Paper
Proceedings Volume PC12750, PC127500F (2023) https://doi.org/10.1117/12.2685867
KEYWORDS: Transistors, Semiconductors, Industry, Silicon, Manufacturing, Semiconducting wafers, System integration, Prototyping, Wafer bonding, Nanosheets

Proceedings Article | 1 October 2019 Paper
Proceedings Volume 11147, 1114719 (2019) https://doi.org/10.1117/12.2536621

Proceedings Article | 3 October 2018 Presentation + Paper
Proceedings Volume 10809, 1080914 (2018) https://doi.org/10.1117/12.2501283
KEYWORDS: Transistors, Lithography, Manufacturing, Silicon, Semiconductors, Molybdenum, Extreme ultraviolet, Logic, Integrated circuits, Computer architecture

Proceedings Article | 16 October 2017 Presentation + Paper
Proceedings Volume 10450, 1045018 (2017) https://doi.org/10.1117/12.2280803

Showing 5 of 6 publications
Proceedings Volume Editor (7)

SPIE Conference Volume | 30 November 2023

SPIE Conference Volume | 9 December 2022

SPIE Conference Volume | 22 October 2021

SPIE Conference Volume | 20 October 2020

SPIE Conference Volume | 15 November 2019

Showing 5 of 7 publications
Conference Committee Involvement (8)
International Conference on Extreme Ultraviolet Lithography 2024
29 September 2024 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2023
2 October 2023 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2022
26 September 2022 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2021
27 September 2021 | Online Only, United States
International Conference on Extreme Ultraviolet Lithography 2020
21 September 2020 | Online Only, California, United States
Showing 5 of 8 Conference Committees
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